System of scanning electron and ion microscopy (dualSEM)

Includes dual beam SEM-FIB FEI Quanta 3D FEG for 3D characterization and micromachining equipped with analytical detectors EBSD and EDS, GISes (Pt, W, SiO2, enhanced etch), nanomanipulator, and a routine SEM FEI Phenom with simple control via the touch screen for training and educational purposes.